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Zirconia (ZrO2) single crystal substrate is one of the earliest high-temperature superconducting substrates developed and applied. Due to the need for ZrO2 to be doped with yttrium (Y) to stabilize its structure, YSZ single crystals - zirconia single crystals with yttrium stabilizers - are generally used in practice. It has good mechanical and chemical stability, low price, and is particularly suitable for use in the preparation of positive films.
Product Description
Zirconia (ZrO2) single crystal substrate is one of the earliest high-temperature superconducting substrates developed and applied. Due to the need for ZrO2 to be doped with yttrium (Y) to stabilize its structure, YSZ single crystals - zirconia single crystals with yttrium stabilizers - are generally used in practice. It has good mechanical and chemical stability, low price, and is particularly suitable for use in the preparation of positive films.
Material Properties
Crystal structure | cube |
Lattice constant | a=5.147 Å |
Melting point (℃) | 2700 |
Density (g/cm3) | 6.0 |
Hardness | 8-8.5（mohs） |
Fineness | 99.99% |
Thermal expansion coefficient (℃) | 10.3×10-6 |
Dielectric constant | ε=27 |
Growing directions | Arc melting method |
Size | 10x3,10x5,10x10,15x15,, 20x15,20x20, or custom-made |
dia 2” x 0.33mm dia2” x 0.43mm 15 x 15 mm | |
Thickness | 0.5mm，1.0mm |
Polishing | Single or double-sided |
Crystal orientation | <001>±0.5º |
Crystal face orientation precision: | ±0.5° |
Edge orientation precision: | 2° (up to 1°) |
Slant chip | The wafer with edge-oriented surfaces (1° -45°) can be processed at specific requirements |
Ra: | ≤5Å（5µm×5µm） |
Package | 100 clean bag, 1000 ultra-clean room |
